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Chemi-MAC

In addition to removing particulate matter, we also remove gaseous substances. Boron free ULPA filter and chemical filter which suppress generation of outgas are carried. Select a suitable chemical filter with the gas.


  • Đặc điểm
  • Thông số kỹ thuật
  • Kích thước
  • Các tính năng khác

  • Boron free ULPA filter and chemical filter are installed.
  • For the chemical filter, select one or more filters from acid gas, alkaline gas, basic gas, organic matter, etc.

 

Model
CHEMI-MAC-32 / CHEMI-MAC-51 / CHEMI-MAC-101
Dust collect efficiency
More than 99.9995% at 0.1μm
Filter
Main filter: PTF filter (ULPA)
Chemical filter: ion exchange fiber filter
Processing air volume (m³/min )
Abt 3 / Abt 5 / Abt 10
Blowing wind speed (m/sec)
Abt 0.49 / Abt 0.47 / Abt 0.51
Power supply
AC100V 1Φ 50/60Hz
Power consumption (W)
30/37 / 44/46 / 102/119
Weight (kg)
Abt 15 / Abt 20 / Abt 20
Structure (Body)
SUS304
Accessories
Main body fixed angle × 2, packing for blow-out port mounting × 1, speed controller, time counter