C type (enclosure type) |
It is the optimum equipment for measuring machine and stepper.
It consists of a humidity control mechanism, blower, air conditioner with built-in HEPA filter and work area (chamber).
The automatic shutter (electric, pressure air), the window for checking operation of the internal device, the door for maintenance can be installed in the chamber.
There is a vertical laminar flow type in which the HEPA filter is placed on the ceiling and a horizontal laminar flow type placed horizontally.
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B Type (open type) |
For Projection Aligner
It is an open type device with built-in air conditioner with temperature control mechanism on the back of vertical laminar flow clean bench.
Small area of installation, include small wheel so easy to move and handle
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S type (separated type) |
Ideal for electron beam lithography equipment, small equipment with processing air volume of 50 m / min or less.
By separating the air conditioner from the work area (chamber) and adopting the duct system, it blocks noise, vibration, electromagnetic noise, etc. In addition, you can operate internal devices from the front, side, and rear four directions.
Equipment of circulation type in which the suction port and work area are ducted are also available.
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Main applications |
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Semiconductor manufacturing |
A stepper (reduction projection exposure apparatus), an aligner, an electron beam drawing apparatus
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Display panel manufacturing |
Liquid crystal panel, plasma display, FED
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Precision machining |
Mirror surface polisher, laser processing machine, magnetic head cutting machine, precision lens polishing machine, spin coater for CD-R · DVD-R
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Precision measuring instrument |
Precision measuring machine, 2D / 3D measuring machine
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Biological |
Precision microscope, handling samples that dislike changes in temperature and humidity, etc.
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