Clean storage system

As a reticle finishing system, the mask inculde fully automatic and manual, and can be designed based on the amount of goods to be stored and the location of the equipment. Inside are placed specialized cleaning equipment to maintain Class 1 ~ 100 cleanliness.

Đặc điểm

Thông số kỹ thuật

Kích thước

Các tính năng khác

Đặc điểm

There are manual automatic entry types and automatic entry types
Designed to suit the amount of storage needed
Internal parts are cleaned with specialized equipment
Cleanliness is maintained within ISO Class (1 ~ 100)

Thông số kỹ thuật

Model	ATV-ACW-855
Cleanliness	ISO5 (class 100)
Dust collect efficience	Over 99.99% with dust particles 0.3µm
Dust collect elements	Main filter: HEPA filter Pre filter, air filter: Non-woven filter
Air volume	6.0m³/min
Power supply	AC100V 1φ, moreover it is able to operate continuously for 1 hour when fully charged
Power consumption	When fully charged: 80VA, when speedy charging : 200VA
Overall dimention	W850×D600×H1420mm

Model	ATV-ADCW-1000
Cleanliness	ISO4 (class 10)
Dust collect efficience	Over 99.99% with dust particles 0.3µm
Dust collect elements	Main filter: HEPA filter Pre filter, air filter: Non-woven filter
Air volume	Abt 4.0m³/min
Air flow passing	Highest 30m / min
Motor passing	DC24V　120W
Capacity increases accordingly	About 5 ℃ (Short time)
Battery	24AH×2
Overall dimension	W1000×D600×H1240mm